Yav dhau los kev sim siv Nd: YAG lasers rau cov txheej txheem cim tsis ua tiav vim tsis muaj zog nqus ntawm 1.064 μ m; Tsis muaj zog txaus tso rau ntawm txheej txheej los tsim cov nyhuv xav tau. Txog rau qhov kawg no, Synchron Laser Service (nyob hauv South Lyon, Michigan, USA) tau tsim cov cuab yeej kho mob saum npoo av los txhim kho ceramic nqus ntawm laser lub teeb nyob rau hauv luv luv wavelength ntau yam. Cov txheej txheem no sai thiab me ntsis immerses lub ceramic nto thiab txhim khu lub zog deposition ntawm ze-infrared laser pulses ntawm ib tug txaus deb deb los tsim tsim nyog melting thiab vaporization. Kev sib koom ua ke no patent tseem tos qhov kev kho mob thev naus laus zis nrog SPI Lasers (nyob hauv Southampton, UK) fiber ntau laser thev naus laus zis, cov txheej txheem ua tau zoo tshaj qhov ua tiav los ntawm kev siv CO2 laser npav tshuab.
Kev kho saum npoo zoo heev txhim kho kev sib koom ua ke ntawm fiber ntau laser beam mus rau saum npoo ntawm ceramic kom pib txheej txheem drilling. Cov kev sib raug zoo ntawm laser pulses thiab cov khoom siv nto, ua ke nrog ib tug customized high-resolution beam kis tau tus mob system uas ua kom zoo ib yam nto qhov chaw loj, txhais tau hais tias me me morphologies yuav ua tau tiav ntawm ceramic substrates. Synchron kuj tau txiav txim siab qee qhov lwm yam laser technologies uas twb muaj lawm, vam tias yuav ua tiav cov kab zoo dua; Tab sis qhov xaus yog tias tsis muaj kev siv tshuab tuaj yeem ua tiav lub hom phiaj ceev hauv nws txoj kev tshwj xeeb, thiab qee zaum nws yog tsawg kawg 10 zaus qeeb.
Piv nrog CO2 lasers, fiber ntau lasers muaj qhov zoo sib xws thiab kev ntseeg tau, tso cai rau kev ua haujlwm zoo dua qub, suav nrog ntau dua peb npaug ntawm ntug zoo tom qab tawg. Daim duab 5 ntxiv qhia txog qhov ua tau zoo ntawm ntug zoo, piav qhia txog qhov qub ntug tsim los ntawm kev txiav cov duab xub. Qhov tseem ceeb, cov txheej txheem tshiab tuaj yeem ua tiav qhov nrawm uas tsis tuaj yeem ua tiav nrog CO2 lasers.
Ntawm 0.0150 nti tuab alumina substrate, lub cim ceev tshaj 1300 ntiv tes ib feeb, uas yog kwv yees li ob npaug ntawm CO2 laser (ob leeg nkag mus 30%); Tab sis qhov machining ceev yog tsawg kawg yog qhov nruab nrab, thiab feem ntau qhov ceev tshaj ntawm CO2 lasers. Raws li Synchron qhov xwm txheej, nws yog vim yog kev siv lub xov tooj ntawm tes tswj qhov tsis yog lub laser uas cov zis tau txwv.
Txoj kev tshiab no tuaj yeem siv los ua cov alumina thiab aluminium nitride ceramics. Thaum siv cov txhuas oxide, cov txheej txheem txwv tuaj yeem ncav cuag lub substrate tuab txog li ntawm 0.060 ntiv tes, txawm hais tias cov ntaub ntawv tuab dua hauv cov ntawv thov xav tau ntev dua. Thicker substrates tseem tuaj yeem muab cov cua sov ntau dua, xws li hauv cov ntawv thov LED siab.
Aluminium nitride ceramics feem ntau nyuaj rau txheej txheem dua li txhuas oxide vim tias lawv cov thermal conductivity zoo dua, yog li yuav tsum tau ua kom muaj zog ntau dua rau kev ua haujlwm. Ntawm qhov tod tes, finer morphology tuaj yeem ua tiav vim tias tsuas yog qhov siab tshaj plaws ntawm cov nqaj tuaj yeem tsim cov txheej txheem uas yuav tsum tau ua, thiab cov thermal conductivity siab ntawm cov khoom txo qis HAZ ntawm ob sab ntawm kab hluav taws xob faib daim ntawv qhia. Cov txiaj ntsig ua ntej siv txoj kev tshiab no zoo heev, thiab cov txheej txheem siv cov khoom siv no tseem tuaj yeem kho tau zoo.